Rsrc
J-GLOBAL ID:201110019217770037   Research Resource code:5000002657 Update date:Feb. 02, 2005

Spectro-ellipsometer

分光エリプソメーター
Owning Organization:
Contact: KAKIUCHI Takashi
Resource classification: Experience equipment, Facilities, etc
Research area  (1): Thin film and surface interface physical properties
Overview:
Apparatus for measuring thickness of organic thin layer
on substrate surface using spectro-ellipsometer
Research field : Hakumaku/Hyomen Kaimen Bussei

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