Rsrc
J-GLOBAL ID:201110020170463996   Research Resource code:1000001710 Update date:Nov. 30, 2002

Scanning probe microscope

微小領域表面観察装置
Owning Organization:
Contact: GODA Kazuo
Resource classification: Experience equipment, Facilities, etc
Research area  (1): Applied optics/quantum optical engineering
Overview:
Main objection :
This apparatus with several microscopes is used for
the surface morphology observation of the sample.
(1)Scanning tunneling microscope The surface morphology
observation of the semiconductor thin film samples.
(2)Atomic force microscopy The surface morphology
observation of the semiconductor thin samples.
User environment and conditions:
No disturbance to research activity.
User procedures and method:
For details, contact person in charge.

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