Rsrc
J-GLOBAL ID:201110025055718095   Research Resource code:1000001650 Update date:Jul. 19, 2001

イオンビームによる個体材料高機能化研究装置

イオンビームによる個体材料高機能化研究装置
Owning Organization:
Contact: Kazuo Kuriyama
Resource classification: Experience equipment, Facilities, etc
Research area  (4): Elementary particle/atomic nucleus/cosmic ray/space physics ,  Physical properties I ,  Applied physical properties/crystal engineering ,  Electron/electric material engineering
Overview:
High Energy ion implantor with energy from 0.4 to 6 MeV
User environment and conditions:
Tandem type accelerator. Voltage 0.2 - 1.5MV, Current <150 muA, Ion B-A, target size <6'', R.T. - 600*

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