Rsrc
J-GLOBAL ID:201110025550269051   Research Resource code:1000001708 Update date:Nov. 30, 2002

Field emission scanning electron microscope.

フィールドエミッション型走査型電子顕微鏡
Owning Organization:
Resource classification: Experience equipment, Facilities, etc
Research area  (1): Thin film and surface interface physical properties
Overview:
Field emission scanning electron microscope.
Features of apparatus: This apparatus equipped with
field emission gun makes it possible to observe high
definition image and widely used for the observation
of geometrical feature.
User environment and conditions:
No disturbance to research activity.
User procedures and method:
For details, contact person in charge.

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