Rsrc
J-GLOBAL ID:201110026621315110   Research Resource code:5000001164 Update date:Jan. 24, 2005

Optical measurement apparatus for thin films

薄膜光学評価装置
Owning Organization:
Contact: WAKAMATSU Takashi
Resource classification: Experience equipment, Facilities, etc
Research area  (2): Thin film and surface interface physical properties ,  Applied optics/quantum optical engineering
Overview:
There is an optical measurement apparatus for the metal
or organic thin films with thicknese lese than light
wave length. The method is a metallic surfae plasmon
resonance measurement in visible light region. Using
the SPR, we can measure the film thickness and optical
constant on high sensibility and high precision.

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