Rsrc
J-GLOBAL ID:201110029524903511   Research Resource code:1000001699 Update date:Nov. 30, 2001

ECR Plasma Sputter

固体ソースECRプラズマ成膜装置
Owning Organization:
Contact: Munecazu Tacano
Resource classification: Research resource, Research sample, Prototype, etc
Research area  (1): Electron/electric material engineering

Return to Previous Page