Rsrc
J-GLOBAL ID:201110040373351280   Research Resource code:1000001702 Update date:Nov. 30, 2002

ECR Dry Etching System

ECRプラズマエッチング装置
Owning Organization:
Contact: Munecazu Tacano
Resource classification: Research resource, Research sample, Prototype, etc
Research area  (1): Electron/electric material engineering

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