Rsrc
J-GLOBAL ID:201110043000141625   Research Resource code:5000001118 Update date:Nov. 19, 2002

Electron beam evaporator

電子ビーム蒸着装置
Owning Organization:
Contact: Munecazu Tacano
Resource classification: Research resource, Research sample, Prototype, etc
Research area  (1): Electron/electric material engineering
User environment and conditions:
半導体素子の電極作成を行う.

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