J-GLOBAL ID:201110054790290864   Research Resource code:1000001821 Update date:Dec. 01, 2005

Fabrication apparatus for nano-structure hybrid devices

Owning Organization:
Contact: T.OHACHI(project leader)
Resource classification: Experience equipment, Facilities, etc
Research area  (4): Applied physical properties/crystal engineering ,  Applied optics/quantum optical engineering ,  Electron/electric material engineering ,  Electronic device/electronic equipment
Molecular beam epitaxial growth apparatus, Focused
ion beam apparatus
Research field : Crystal Growth, Electrical and Electronic Materials
User environment and conditions:
Inside of clean room
User procedures and method:
require previous arrangement with RCAST

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