Rsrc
J-GLOBAL ID：201110054790290864
Research Resource code：1000001821
Update date：Dec. 01, 2005
Fabrication apparatus for nano-structure hybrid devices
ナノ構造ハイブリッドデバイス製作装置
Owning Organization：
Contact：
T.OHACHI(project leader)
Resource classification：
Experience equipment, Facilities, etc
Research area (4)：
Applied physical properties/crystal engineering
, Applied optics/quantum optical engineering
, Electron/electric material engineering
, Electronic device/electronic equipment
Overview：
Molecular beam epitaxial growth apparatus, Focused
ion beam apparatus
Research field ：
Crystal Growth, Electrical and Electronic Materials
User environment and conditions：
Inside of clean room
User procedures and method：
require previous arrangement with RCAST
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