J-GLOBAL ID:201110064104034372   Research Resource code:1000001711 Update date:Nov. 30, 2002

Ionized cluster beam deposition apparatus

Owning Organization:
Contact: GODA Kazuo
Resource classification: Experience equipment, Facilities, etc
Research area  (1): Applied optics/quantum optical engineering
Main objection :
The fabrication of the semiconductor thin film samples
with new optical function by ionized cluster beam
deposition method.
User environment and conditions:
No disturbance to research activity.
User procedures and method:
For details, contact person in charge.

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