J-GLOBAL ID:201110071150426931   Research Resource code:1000001895 Update date:Dec. 13, 2005

Exposure equipment for LIGA process

Owning Organization:
Contact: SUGIYAMA Susumu
Resource classification: Experience equipment, Facilities, etc
Research area  (1): Structural/functional materials
High aspect ratio microparts for micromachines
can be fabricated using LIGA process which is
combined X-ray lithography, electroforming and
molding. The X-ray exposure is the most important
step in the LIGA process. Patterns designed on an
X-ray mask can be transferred into an X-ray
sensitive resist layer with a thickness of
several hundred mu m to 1000 mu m by means of
synchrotron radiation.
User environment and conditions:
User procedures and method:
1-1-1 Noji Higashi, Kusatsu-shi, Shiga 525-8577

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