Rsrc
J-GLOBAL ID:201110071374911584   Research Resource code:5000000769 Update date:Nov. 22, 2004

Ultra Small, High Density Structure Formation System

微細高密度構造形成装置一式
Contact: YOKOYAMA Shin, SHIBAHARA Kentaro
Resource classification: Experience equipment, Facilities, etc
Research area  (1): Electronic device/electronic equipment
Overview:
Device which transfers the 0.35μm small pattern to resist.
Research field : Denshi Device/Denshi Kiki
User environment and conditions:
The glass mask, which is the original pattern, is necessary.
User procedures and method:
Please submit an application form through nano-level
foundry support;
http://home.hiroshima-u.ac.jp/nanotech/

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