Rsrc
J-GLOBAL ID:201110075889791170   Research Resource code:1000001896 Update date:Dec. 13, 2005

SR micro lithography and etching for micro/nano fabrication

SMILEI(放射光)
Owning Organization:
Contact: SUGIYAMA Susumu
Resource classification: Experience equipment, Facilities, etc
Research area  (1): Intelligent mechanics/mechanical system
Overview:
Three-dimensional microstructures can be
fabricated by combining a deep X-ray lithography
and multi-degree-of-freedom substrate stage with
moving X-ray mask technique. The application of
this equipment includes micro optical device,
micro chemical analysis chip and electrophoresis
chip for DNA sequencing.
User environment and conditions:
研究業務の遂行に支障のないこと
User procedures and method:
1-1-1 Noji Higashi, Kusatsu-shi, Shiga 525-8577
Japan
+81-77-561-2631
+81-77-561-2633

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