Rsrc
J-GLOBAL ID:201110078497319102   Research Resource code:1000000410 Update date:Jan. 18, 2010

電子線極微小領域内画像計測システム

電子線極微小領域内画像計測システム
Owning Organization:
Contact: 平井 秀一郎
Resource classification: Experience equipment, Facilities, etc
Research area  (3): Fluidics ,  Thermal engineering ,  Energy studies
Overview:
Image Measuring System with Electron Beam within Ultra
micro Domains
Major applications: Morphology within micro domains by
electron beam and distribution of atomic density by
X-ray analysis
(1) Morphological measurement: Electric Field Radiation
Type Scanning Electron Microscope (Magnification: 100 -
500 thousand; Resolution: Secondary electron image 1.5 nm)
(2) Atomic Density Analysis: Energy Dispersion X-ray
Analyzer (Elements detectable: Be - U; Mapping: Up to 20
elements)
User environment and conditions:
No disturbance on our research activities.
User procedures and method:
Contact our staff in 'Steering Committee for MRI and SEM
Image Measurement Systems" for details.
Fee: Observe the fee designated by the above-mentioned
Committee.
Qualification: Joint research member with an instructor
of the University
Limitations on use: Follow ruled determined by the
above-mentioned Committee.

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