Rsrc
J-GLOBAL ID:201110094124384821   Research Resource code:5000003696 Update date:Jul. 20, 2005

Equipments for semicondactor manufacturing and evaluation

半導体製造・評価装置
Owning Organization:
Contact: Director, USHIODA Sukekatsu
Resource classification: Experience equipment, Facilities, etc
Research area  (4): Electron/electric material engineering ,  Electronic device/electronic equipment ,  Communication/network engineering ,  System engineering
Overview:
CVD、e-heam,イオン注入、RIE、炉、MBE、ステッパ、LSIテスタ、
AFM、STM、SEM、ESCA、TEM
User environment and conditions:
研究業務の遂行に支障のないこと
User procedures and method:
施設受付・案内 Tel:022-217-5563

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