Rsrc
J-GLOBAL ID：201110094124384821
Research Resource code：5000003696
Update date：Jul. 20, 2005
Equipments for semicondactor manufacturing and evaluation
半導体製造・評価装置
Owning Organization：
Contact：
Director, USHIODA Sukekatsu
Resource classification：
Experience equipment, Facilities, etc
Research area (4)：
Electron/electric material engineering
, Electronic device/electronic equipment
, Communication/network engineering
, System engineering
Overview：
CVD、e-heam,イオン注入、RIE、炉、MBE、ステッパ、LSIテスタ、
AFM、STM、SEM、ESCA、TEM
User environment and conditions：
研究業務の遂行に支障のないこと
User procedures and method：
施設受付・案内 Tel:022-217-5563
Return to Previous Page
