J-GLOBAL ID:201110098328490600   Research Resource code:5000002438 Update date:Dec. 02, 2004

Design and fabrication systems for integrated circuits

Contact: Director, IWATA Atsushi
Resource classification: Experience equipment, Facilities, etc
Research area  (3): Physical properties I ,  Electron/electric material engineering ,  Electronic device/electronic equipment
Fabrication line for ultra small transistors with
gate length less than 0.1 micrometer, and design
system for integrated circuits.
User environment and conditions:
No disturbance to our research
User procedures and method:
Ask to the person in charge.

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