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J-GLOBAL ID:201202225858654733   Reference number:12A0587567

N2運動エネルギー誘起Al(111)窒化におけるインキュベーション時間の623K以下での表面温度依存性

Author (7):
Material:
Volume: 59th  Page: ROMBUNNO.18A-B6-4  Publication year: Feb. 29, 2012 
JST Material Number: Y0054B  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Thesaurus term/Semi thesaurus term
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JST classification
Category name(code) classified by JST.
Nitrogen and its compounds 

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