Performance enhancement of semiconductor devices by control of discrete dopant distribution

HORI M; SHINADA T; TAIRA K; SHIMAMOTO N; TANII T; ENDO T; OHDOMARI I

Art

J-GLOBAL ID：201202231221554808 Reference number：12A1028336

Performance enhancement of semiconductor devices by control of discrete dopant distribution

離散的ドーパント分布の制御による半導体素子の性能増強

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Material：
Volume： 20 Issue： 36 Page： 365205 (5 PP.) Publication year： 2009
JST Material Number： W0108A ISSN： 0957-4484 CODEN： NNOTER Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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