Role of Nitrogen in the Formation of CN<sub>x</sub> Films by Pulsed Laser Deposition

WANG Zhiping; ITO Hiroaki; MASUGATA Katsumi

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J-GLOBAL ID：201202231686290076 Reference number：12A1103083

Role of Nitrogen in the Formation of CN_x Films by Pulsed Laser Deposition

パルスレーザ蒸着によるCN_x膜の形成における窒素の役割

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Volume： 40 Issue： 7,Pt.1 Page： 1815-1819 Publication year： Jul. 2012
JST Material Number： D0036B ISSN： 0093-3813 CODEN： ITPSBD Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Thin films of other inorganic compounds

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Role of Nitrogen in the Formation of CNx Films by Pulsed Laser Deposition

Role of Nitrogen in the Formation of CN_x Films by Pulsed Laser Deposition