Formation of Nanovoids In Femtosecond Laser-irradiated Single Crystals of Silicon Carbide

OKADA Tatsuya; TOMITA Takuro; MATSUO Shigeki; HASHIMOTO Shuichi; KASHINO Ryota; ITO Takuto

Art

J-GLOBAL ID：201202235307467210 Reference number：12A1203669

Formation of Nanovoids In Femtosecond Laser-irradiated Single Crystals of Silicon Carbide

フェムト秒レーザ照射炭化けい素単結晶におけるナノボイドの形成

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Material：
Volume： 725 Page： 19-22 Publication year： 2012
JST Material Number： D0716B ISSN： 0255-5476 Document type： Article
Country of issue： Switzerland (CHE) Language： ENGLISH (EN)

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