Art
J-GLOBAL ID：201202240940933585   Reference number：12A1602206

An accurate characterization of interface-state by deep-level transient spectroscopy for Ge metal-insulator-semiconductor capacitors with SiO2/GeO2 bilayer passivation

SiO2/GeO2二層不動態皮膜を有するGe金属-絶縁体-半導体キャパシタの界面準位の深準位過渡分光による正確なキャラクタリゼーション
Author (5)：
WANG Dong

About WANG Dong

(Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JPN)

About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JPN

, 
KOJIMA Shuta

About KOJIMA Shuta

(Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JPN)

About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JPN

, 
SAKAMOTO Keita

About SAKAMOTO Keita

(Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JPN)

About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JPN

, 
YAMAMOTO Keisuke

About YAMAMOTO Keisuke

(Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JPN)

About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JPN

, 
NAKASHIMA Hiroshi

About NAKASHIMA Hiroshi

(Art, Sci. and Technol. Center for Cooperative Res., Kyushu Univ., 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JPN)

About Art, Sci. and Technol. Center for Cooperative Res., Kyushu Univ., 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JPN


Material：
Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)

About Journal of Applied Physics


Volume： 112  Issue： 8  Page： 083707-083707-5  Publication year： Oct. 15, 2012 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*MOS structure

About MOS structure

, 
*germanium

About germanium

, 
silicon dioxide

About silicon dioxide

, 
germanium oxide

About germanium oxide

, 
titanium compound

About titanium compound

, 
nitride

About nitride

, 
aluminum

About aluminum

, 
*surface level

About surface level

, 
state density

About state density

, 
deep level transient spectroscopy

About deep level transient spectroscopy

, 
passivation

About passivation

, 
annealing(heat treatment)

About annealing(heat treatment)

, 
MOSFET

About MOSFET

, 
carrier mobility

About carrier mobility


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*interface state

About interface state

, 
level density

About level density

, 
titanium nitride

About titanium nitride


JST classification (1)：
JST classification
Category name(code) classified by JST.
Metal-insulator-semiconductor structures 
(BM03085X)

About Metal-insulator-semiconductor structures

Terms in the title (9)：
Terms in the title
Keywords automatically extracted from the title.
SiO2

About SiO2

, 
二層

About 二層

, 
不動態皮膜

About 不動態皮膜

, 
Ge

About Ge

, 
絶縁体

About 絶縁体

, 
キャパシタ

About キャパシタ

, 
界面準位

About 界面準位

, 
深準位過渡分光

About 深準位過渡分光

, 
キャラクタリゼーション

About キャラクタリゼーション


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