Art
J-GLOBAL ID：201302211637135401   Reference number：13A0853623

反応性スパッタリング法によるAl2O3:H薄膜の作製と評価

Author (3)：
ITO HIROSHI

About ITO HIROSHI

(東京工高専)

About 東京工高専

, 
KAWAMATA YOSHIO

About KAWAMATA YOSHIO

(芝浦メカトロニクス)

About 芝浦メカトロニクス

, 
OYAMA MASANORI

About OYAMA MASANORI

(共立)

About 共立


Material：
応用物理学会春季学術講演会講演予稿集(CD-ROM)  (Extended Abstracts. JSAP Spring Meeting (CD-ROM))

About 応用物理学会春季学術講演会講演予稿集(CD-ROM)


Volume： 60th  Page： ROMBUNNO.29A-A4-5  Publication year： Mar. 11, 2013 
JST Material Number： Y0054B  ISSN： 2436-7613  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*thin film growth

About thin film growth

, 
reactive sputtering

About reactive sputtering

, 
*aluminum oxide

About aluminum oxide

, 
carrier recombination

About carrier recombination

, 
*carrier lifetime

About carrier lifetime


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
surface recombination

About surface recombination


JST classification (2)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

,  Photoconduction,photoelectromotive force 
(BM03050J)

About Photoconduction,photoelectromotive force

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
反応性スパッタリング

About 反応性スパッタリング

, 
Al2O3

About Al2O3

, 
薄膜

About 薄膜

, 
作製

About 作製

, 
評価

About 評価


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