About KAWAI Yoshinobu
About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, JPN
About UCHINO Kiichiro
About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, JPN
About MUTA Hiroshi
About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, JPN
About ROEWF Tobias
About NoordZug, Lange Strasse 69, 17489 Greifswald, DEU
About Vacuum
About electron cyclotron resonance plasma
About plasma source
About magnetic flux density
About pressure effect
About ion current
About area
About homogeneity
About plasma density
About electron temperature
About microwave discharge
About distribution
About ion saturation current
About magnetic field distribution
About large area
About Plasma devices
About Gas discharges
About ECRプラズマ
About 開発