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J-GLOBAL ID:201302229467580517   Reference number:13A0854354

Optical properties of “black silicon” formed by catalytic etching of Au/Si(100) wafers

Au/Si(100)ウエハの触媒エッチングにより形成された”黒色シリコン”の光学的性質
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Volume: 113  Issue: 17  Page: 173502-173502-9  Publication year: May. 07, 2013 
JST Material Number: C0266A  ISSN: 0021-8979  CODEN: JAPIAU  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Crystal growth of semiconductors 

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