About YAMANE Tsukasa
About Solar Power Dep., Mitsubishi Heavy Industries Ltd., Isahaya, Nagasaki, 854-0065, JPN
About NAKAO Sachiko
About Solar Power Dep., Mitsubishi Heavy Industries Ltd., Isahaya, Nagasaki, 854-0065, JPN
About TAKEUCHI Yoshiaki
About Solar Power Dep., Mitsubishi Heavy Industries Ltd., Isahaya, Nagasaki, 854-0065, JPN
About YAMAUCHI Yasuhiro
About Solar Power Dep., Mitsubishi Heavy Industries Ltd., Isahaya, Nagasaki, 854-0065, JPN
About TAKATSUKA Hiromu
About Solar Power Dep., Mitsubishi Heavy Industries Ltd., Isahaya, Nagasaki, 854-0065, JPN
About MUTA Hiroshi
About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, JPN
About UCHINO Kiichiro
About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, JPN
About KAWAI Yoshinobu
About Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., Kasugakoen 6-1, Kasuga, Fukuoka 816-8580, JPN
About Surface & Coatings Technology
About plasma
About VHF
About silane
About hydrogen
About plasma parameter
About Langmuir probe
About anion
About electron temperature
About confinement
About solar cell
About silicon
About microcrystal
About electron density
About rate of crystallization
About Langmuir probe
About VHF plasma
About microcrystalline silicon
About negative-ion
About Plasma equilibrium and confinement
About Applications of plasma
About Solar cell
About 負イオン
About VHF
About SiH4
About H2
About プラズマ特性