Art
J-GLOBAL ID:201302234247111200
Reference number:13A0391360
Simultaneous measurement of emissivity and temperature of silicon wafers using a polarization technique
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Author (2):
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Material:
Volume:
43
Issue:
5
Page:
645-651
Publication year:
2010
JST Material Number:
O3701A
ISSN:
0263-2241
Document type:
Article
Country of issue:
Other (ZZZ)
Language:
ENGLISH (EN)
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