Art
J-GLOBAL ID:201302234247111200   Reference number:13A0391360

Simultaneous measurement of emissivity and temperature of silicon wafers using a polarization technique

Author (2):
Material:
Volume: 43  Issue:Page: 645-651  Publication year: 2010 
JST Material Number: O3701A  ISSN: 0263-2241  Document type: Article
Country of issue: Other (ZZZ)  Language: ENGLISH (EN)

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