Art
J-GLOBAL ID：201302239290913389   Reference number：13A1181456

Highly textured multi-crystalline silicon surface obtained by dry etching multi-step process

ドライエッチング多重ステップ工程で得た高度に組織化した多結晶シリコン表面
Author (6)：
CECCHETTO L.

About CECCHETTO L.

(ENEA-Research Centre Casaccia Roma, ITA)

About ENEA-Research Centre Casaccia Roma, ITA

, 
SERENELLI L.

About SERENELLI L.

(ENEA-Research Centre Casaccia Roma, ITA)

About ENEA-Research Centre Casaccia Roma, ITA

, 
AGARWAL G.

About AGARWAL G.

(Dep. of Physics, Bhavnagar Univ., Bhavnagar, Gujrat, IND)

About Dep. of Physics, Bhavnagar Univ., Bhavnagar, Gujrat, IND

, 
IZZI M.

About IZZI M.

(ENEA-Research Centre Casaccia Roma, ITA)

About ENEA-Research Centre Casaccia Roma, ITA

, 
SALZA E.

About SALZA E.

(ENEA-Research Centre Casaccia Roma, ITA)

About ENEA-Research Centre Casaccia Roma, ITA

, 
TUCCI M.

About TUCCI M.

(ENEA-Research Centre Casaccia Roma, ITA)

About ENEA-Research Centre Casaccia Roma, ITA


Material：
Solar Energy Materials and Solar Cells  (Sol Energy Mater Sol Cells)

About Solar Energy Materials and Solar Cells


Volume： 116  Page： 283-290  Publication year： Sep. 2013 
JST Material Number： D0513C  ISSN： 0927-0248  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*polysilicon

About polysilicon

, 
*plasma etching

About plasma etching

, 
Argon

About Argon

, 
nitrogen fluoride

About nitrogen fluoride

, 
*mixed gas

About mixed gas

, 
time companding

About time companding

, 
radiation damage

About radiation damage

, 
*process parameter

About process parameter

, 
reflectivity

About reflectivity

, 
machining speed

About machining speed

, 
time companding

About time companding


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
etch rate

About etch rate


JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
ドライエッチング

About ドライエッチング

, 
多重

About 多重

, 
組織化

About 組織化

, 
多結晶シリコン

About 多結晶シリコン


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