Art
J-GLOBAL ID：201302244971742942   Reference number：13A0274410

Diodes fabricated by electron beam doping (superdiffusion) technique in semiconductors at room temperature

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Author (2)：
FUJIMOTO H

About FUJIMOTO H

, 
WADA T

About WADA T


Material：
DEFECTS AND DIFFUSION IN SEMICONDUCTORS: AN ANNUAL RETROSPECTIVE VI

About DEFECTS AND DIFFUSION IN SEMICONDUCTORS: AN ANNUAL RETROSPECTIVE VI


Volume： 221-2  Page： 23-30  Publication year： 2003 
JST Material Number： O9352A  Document type： Article
Country of issue： Other (ZZZ)  Language： ENGLISH (EN)

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