Art
J-GLOBAL ID：201302252944333570   Reference number：13A0393469

Fabrication of microcoils with narrow and high aspect ratio coil lines

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Author (4)：
HATTORI T

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, 
KOBAYASHI Y

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, 
SETOMOTO M

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, 
NODA D

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Material：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

About MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS


Volume： 16  Issue： 8-9  Page： 1479-1483  Publication year： 2010 
JST Material Number： O3892A  ISSN： 0946-7076  Document type： Article
Country of issue： Other (ZZZ)  Language： ENGLISH (EN)
Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
COIL

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