Highly (001)-oriented α-Al<sub>2</sub>O<sub>3</sub> films prepared by laser chemical vapor deposition

YOU Yu; ITO Akihiko; GOTO Takashi

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J-GLOBAL ID：201302272414860405 Reference number：13A1181543

Highly (001)-oriented α-Al₂O₃ films prepared by laser chemical vapor deposition

レーザ化学蒸着法により調製した高度に(001)配向したα-Al₂O₃膜

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Author (3)： , ,
Material：
Volume： 106 Page： 11-13 Publication year： Sep. 01, 2013
JST Material Number： E0935A ISSN： 0167-577X Document type： Article
Article type：短報 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Oxide thin films

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Highly (001)-oriented α-Al2O3 films prepared by laser chemical vapor deposition

Highly (001)-oriented α-Al₂O₃ films prepared by laser chemical vapor deposition