Art

J-GLOBAL ID：201302274950164880   Reference number：13A0138240

先進的干渉計測技術の展望-計算光学とモデル同定干渉計測-

Author (1)： TAKEDA MITSUO (宇都宮大 オプティクス教育研究セ)
Material： 光技術コンタクト  (Optical and Electro-Optical Engineering Contact)
Volume： 51  Issue： 1  Page： 21-28  Publication year： Jan. 20, 2013 
JST Material Number： S0624A  ISSN： 0913-7289  Document type： Article
Article type： 文献レビュー  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： coherence length ,  review ,  technological forecasting ,  speedup ,  interference fringe ,  *optical interferometry ,  interferometer ,  identification ,  numerical calculation ,  white light ,  optical heterodyne ,  instrumentation technique ,  physical optics ,  trend of research and development ,  white-light interferometry
Semi thesaurus term： mensuration technique ,  research direction ,  future view ,  white-light interferometry

JST classification (1)： Interferometry and interferometers  (BD07070G)

Reference (16)：

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• 2)E. Y. Lam and A. K. Wong: “Computational lithography: virtual reality and virtual virtuality," Opt. Exp. 17, Iss. 15 (2009) pp.12259-12268.
• 3)E. R. Dowski, Jr. and G. E. Johnson: "Wavefront coding: a modern method of achieving high-performance and/or low-cost imaging systems," Proc. SPIE 3779, Current Developments in Optical Design and Optical Engineering VIII, 137 (October 5, 1999).
• 4)W. Osten: "Different ways to overcome the resolution problem in optical micro and nono metrology," in Optical Imaging and Metrology, W. Osten and N. Reigand Eds., (Wilety-VCH, Weiheim, 2012) pp.327-368.
• 5)H. Schreiber and J. H. Bruning: “Phase Shifting Interferometry", Optical Shop Testing D. Malacara Ed.(Jon Wiley & Sons, New Jersey,2007)pp.571-574;成相恭二,清原順子,辻内順平(訳),光学実験・測定法II(アドコムメディア,2010) pp.129-131.

Terms in the title (5)： 干渉計測 ,  展望 ,  計算 ,  光学 ,  モデル同定