About THANH-VINH Nguyen
About Univ. Tokyo, Tokyo, JPN
About MATSUMOTO Kiyoshi
About Univ. Tokyo, Tokyo, JPN
About SHIMOYAMA Isao
About Univ. Tokyo, Tokyo, JPN
About センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)
About electric resistance
About cantilever beam
About tactile sensor
About three dimension
About high sensitivity
About cavity
About polyxylylene
About parylene
About cavity
About piezoresistance
About microcantilever
About piezoelectric cantilever
About Design,manufacturing,and components of robots
About 感度向上
About ピエゾ抵抗
About カンチレバー
About キャビティ
About 触覚センサ