Term
J-GLOBAL ID：201306039353139048
surface micromachining
Subject category：
Subject category
Subject category of the technical term.
電子素子
Synonyms (1)：
surface micromachining
(表面マイクロマシニング)
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Related terms (2)：
MEMS
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surface
(表面)
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Broader terms (1)：
micromachining
(マイクロマシニング)
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