About CHIDA RYUTARO
About ISHINO YUJI
About TAKASAKI MASAYA
About MIZUNO TAKESHI
About 精密工学会大会学術講演会講演論文集
About pressure measurement
About ultrasonic wave
About supporting structure
About diaphragm(machine element)
About acoustic wave
About floating
About micromachine
About silicon
About wafer
About polyimide
About polymer thin film
About vibrator
About gap
About Measuring methods and instruments of force,work load,pressure,friction
About 超音波
About 支持
About ギャップ
About 圧力測定
About 質量
About ダイアフラム
About 圧力センサ