Art

J-GLOBAL ID：201402217392088564   Reference number：14A0413243

Radiation tolerance of Si_1-yC_y source/drain n-type metal oxide semiconductor field effect transistors with different carbon concentrations

異なる炭素濃度のSi_1-yC_yのソース/ドレインn型金属酸化膜半導体電界効果トランジスタの放射線耐性

Author (12)： NAKASHIMA Toshiyuki (Interdisciplinary Graduate School of Agriculture and Engineering, Univ. of Miyazaki, 1-1 Gakuen Kibanadai-nishi ...) ,  NAKASHIMA Toshiyuki (Chuo Denshi Kogyo Co., Ltd., 3400 Kohoyama, Matsubase, Uki, Kumamoto, JPN) ,  ASAI Yuki (Kumamoto National Coll. of Technol., 2659-2 Suya, Koshi, Kumamoto 861-1102, JPN) ,  HORI Masato (Kumamoto National Coll. of Technol., 2659-2 Suya, Koshi, Kumamoto 861-1102, JPN) ,  YONEOKA Masashi (Kumamoto National Coll. of Technol., 2659-2 Suya, Koshi, Kumamoto 861-1102, JPN) ,  TSUNODA Isao (Kumamoto National Coll. of Technol., 2659-2 Suya, Koshi, Kumamoto 861-1102, JPN) ,  TAKAKURA Kenichiro (Kumamoto National Coll. of Technol., 2659-2 Suya, Koshi, Kumamoto 861-1102, JPN) ,  GONZALEZ Mireia Bargallo (Inst. de Microelectronica de Barcelona (Centre Nacional de Microelectronica - Consejo Superior de Investigaciones ...) ,  SIMOEN Eddy (imec, Kapeldreef 75, B-3001 Leuven, BEL) ,  CLAEYS Cor (imec, Kapeldreef 75, B-3001 Leuven, BEL) ,  CLAEYS Cor (Dep. of Electrical Engineering, KU Leuven, Kasteelpark Arenberg 10, B-3001 Leuven, BEL) ,  YOSHINO Kenji (Interdisciplinary Graduate School of Agriculture and Engineering, Univ. of Miyazaki, 1-1 Gakuen Kibanadai-nishi ...)
Material： Thin Solid Films
Volume： 557  Page： 307-310  Publication year： Apr. 30, 2014 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Thesaurus term： *MOSFET ,  *radiation resistance(radiation effect) ,  electron irradiation ,  *radiation damage ,  *doping ,  carbon ,  *carrier mobility ,  lattice distortion ,  concentration dependence
Semi thesaurus term： electron beam irradiation ,  electron mobility

JST classification (1)： Transistors  (NC03070N)

Terms in the title (6)： 炭素濃度 ,  ソース ,  ドレイン ,  N型金属酸化膜半導体 ,  電界効果トランジスタ ,  放射線耐性