Art
J-GLOBAL ID:201402218227744755   Reference number:14A0897614

Ar-GCIBによる極浅スパッタ効果 二次イオン質量分析への応用と有機物の選択的スパッタリング

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Material:
Volume: 24  Issue:Page: 53-57  Publication year: Aug. 10, 2014
JST Material Number: L1138A  ISSN: 0917-1819  CODEN: KTEKER  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Semi thesaurus term:
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

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Category name(code) classified by JST.
Mass spectrometry  ,  Manufacturing technology of solid-state devices 

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