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J-GLOBAL ID:201402222341060960   Reference number:14A0371278

周期的な非稠密円柱配列構造のボトムアップ形成

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Volume: 61st  Page: ROMBUNNO.19P-D6-12  Publication year: Mar. 03, 2014 
JST Material Number: Y0054B  ISSN: 2758-4704  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Techniques and equipment of thin film deposition 
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