About INOUE Tomoyasu
About Iwaki Meisei Univ., 5-5-1 Chuodai Iino, Iwaki 970-8551, JPN
About SHIDA Shigenari
About Iwaki Meisei Univ., 5-5-1 Chuodai Iino, Iwaki 970-8551, JPN
About Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
About epitaxy
About selective growth
About chemical vapor deposition
About wafer
About cerium oxide
About magnetron sputtering
About X-ray diffraction
About electrical resistivity
About preferred orientation
About crystal orientation
About domain structure
About SOI structure
About dielectric thin film
About selective epitaxy
About electron-beam-induced deposition
About reactive magnetron sputtering
About silicon substrate
About Oxide thin films
About Applications of electron beams and ion beams
About 電子ビーム
About 誘起
About 配向
About エピタクシー
About Si
About 方位