Art

J-GLOBAL ID：201402228010637875   Reference number：14A1231842

Electrostatic-induction-type MEMS Energy Harvester Using Electret

環境発電 エレクトレットを用いた静電誘導型MEMS発電器

Author (1)： SUZUKI YUJI (東大)
Material： 日本AEM学会誌  (Journal of the Japan Society of Applied Electromagnetics and Mechanics)
Volume： 22  Issue： 3  Page： 361-367  Publication year： Sep. 10, 2014 
JST Material Number： L2703A  ISSN： 0919-4452  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： power generation ,  *MEMS ,  *generator ,  *electrostatic induction ,  electret ,  silicon dioxide ,  silicon nitride ,  semiconductor thin film ,  energy conversion ,  power supply ,  vibrational energy ,  *Micro Electro Mechanical System power generation ,  *energy harvesting ,  oscillation generation
Semi thesaurus term： *electret power generator ,  *energy harvesting ,  vibration energy harvesting

JST classification (1)： Other solid-state devices  (NC03150A)

Reference (33)：

• J. A. Paradiso, and T. Starner, Energy scavenging for mobile and wireless electronics, IEEE Pervasive Comput., Vol. 4, pp. 18-27, 2005.
• P. D. Micheson, T. C. Green, E. M. Yeatman, and A. S. Holmes, Architectures for vibration-driven micropower generators, J. Microelectromech. Syst., Vol. 13, pp. 429-440, 2004.
• Y. Suzuki, Recent progress in MEMS electret generator for energy harvesting, IEEJ Trans. Electr. Electr. Eng., Vol. 6, pp. 101-111, 2011.
• M. Eguchi, On the permanent electret, Phil. Mag., Vol. 49, p. 178, 1925.
• G. M. Sessler, Electrostatic microphones with electret foil, J. Acoust. Soc. Am., Vol. 35, pp. 1354-1357, 1963.

Terms in the title (4)： 環境発電 ,  エレクトレット ,  静電誘導 ,  MEMS発電