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J-GLOBAL ID:201402247239601097   Reference number:14A0422244

金属ナノ粒子を触媒としてシリコン上に形成した無電解めっき膜のコンタクト抵抗

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Material:
Volume: 129th  Page: 95  Publication year: Mar. 03, 2014 
JST Material Number: Y0050A  ISSN: 0917-2947  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Electroless plating 

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