Rchr
J-GLOBAL ID:201501003892733509   Update date: Mar. 21, 2024

Yamauchi Kazuto

ヤマウチ カズト | Yamauchi Kazuto
Affiliation and department:
Job title: Professor
Homepage URL  (1): http://www-up.prec.eng.osaka-u.ac.jp/
Research field  (4): Machine materials and mechanics ,  Astronomy ,  Quantum beam science ,  Manufacturing and production engineering
Research keywords  (30): CEM ,  液体金属イオン源 ,  X線干渉計 ,  非接触 ,  波面光学 ,  基板改質 ,  起精密加工 ,  超精密加工面 ,  半導体 ,  ポリシング ,  シリコン薄膜 ,  イオン照射 ,  低温成膜 ,  非球面ミラー ,  表面光起電力 ,  X線光学 ,  エッチング ,  表面電子準位 ,  放射光 ,  X線顕微鏡 ,  分光 ,  SPV ,  表面改質 ,  シリコン ,  X線自由電子レーザー ,  X線ミラー ,  X線集光 ,  数値制御加工 ,  超精密加工 ,  EEM
Research theme for competitive and other funds  (20):
  • 2021 - 2025 Development of X-ray nanobeam optics by precision wavefront control
  • 2015 - 2018 Analysis of reaction process in Catalyst-refered etching by means of first-principles calculations
  • 2011 - 2016 Adaptively controlled multistage nanofocusing systemfor x-ray free electron laser
  • 2012 - 2014 Development of Ultra-Precision X-ray Mirror towards Future Solar Observations
  • 2010 - 2012 Analysis of CAtalyst-Referred etching by means of first-principles calculations
Show all
Papers (762):
  • D. Toh, K. Takeda, K. Kayao, Y. Ohkubo, K. Yamauchi, Y. Sano. Ultra-precision smooth surface on polymer material prepared by catalyst-referred etching. International Journal of Automation Technology. 2024. 18. 2. 240-247
  • Shotaro Matsumura, Iori Ogasahara, Masafumi Miyake, Taito Osaka, Daisetsu Toh, Jumpei Yamada, Makina YABASHI, Kazuto Yamauchi, Yasuhisa Sano. High-pressure plasma etching up to 9 atm toward uniform processing inside narrow grooves of high-precision X-ray crystal optics. Applied Physics Express. 2023
  • Daisetsu Toh, Kiyoto Kayao, Kazuto Yamauchi, Yasuhisa Sano. Fabrication of YAG ceramics surface without damage and grain boundary steps using catalyzed chemical wet etching. CIRP Journal of Manufacturing Science and Technology. 2023. 47. 1-6
  • Daisetsu Toh, Kiyoto Kayao, Pho Van Bui, Kouji Inagaki, Yoshitada Morikawa, Kazuto Yamauchi, Yasuhisa Sano. Catalyst enhancement approach for improving the removal rate and stability of silica glass polishing via catalyzed chemical etching in pure water. Precision Engineering. 2023. 84. 21-27
  • Jumpei Yamada, Satoshi Matsuyama, Ichiro Inoue, Taito Osaka, Takato Inoue, Nami Nakamura, Yuto Tanaka, Yuichi Inubushi, Toshinori Yabuuchi, Kensuke Tono, et al. Ultimate condensation of hard X-ray free-electron laser reaching single-nanometre focus size and 1022 W/cm2 intensity. 2023
more...
MISC (352):
  • 山田純平, 松山智至, 井上陽登, 伊藤篤輝, 田中優人, 大坂泰斗, 井上伊知郎, 犬伏雄一, 湯本博勝, 湯本博勝, et al. Advanced KBミラーに基づく硬X線自由電子レーザーsub-10nm集光システム. 日本放射光学会年会・放射光科学合同シンポジウム(Web). 2022. 35th
  • 櫛川新太, 西岡柚香, 藤大雪, 山内和人, 佐野泰久. 大気圧プラズマによる表面処理を利用した常温接合技術の開発. 精密工学会関西地方定期学術講演会講演論文集. 2022. 2022
  • 中上元太, 崔泰樹, 藤大雪, 山内和人, 佐野泰久. 水素ガスを用いた大気圧プラズマによる窒化ガリウム基板の高能率エッチング. 精密工学会関西地方定期学術講演会講演論文集. 2022. 2022
  • 萱尾澄人, 藤大雪, 山田純平, 山内和人, 佐野泰久. 紫外光照射を援用した触媒表面基準エッチング法を用いた窒化ガリウム基板の高能率平滑化. 精密工学会関西地方定期学術講演会講演論文集. 2022. 2022
  • 山田純平, 松山智至, 松山智至, 井上陽登, 中村南美, 田中優人, 大坂泰斗, 井上伊知郎, 犬伏雄一, 犬伏雄一, et al. Wolter III型advanced KBミラーによるXFEL sub-10nm集光光学系の開発. 日本放射光学会年会・放射光科学合同シンポジウム(Web). 2021. 34th
more...
Books (18):
  • Atomically Controlled Planarization by Catalyst Referred Etching Method
    New Glass Forum 2017
  • Development of precision mirrors for X-ray nanofocusing and nanoimaging
    The Japan Society of Applied Physics 2017
  • 學士會会報 No.923 放射光科学に貢献するX線のナノ集光技術
    學士會 2017
  • 蛍光X線分析の実際 第2版 13.4章 高空間分解能化のための光学技術
    朝倉書店 2016 ISBN:9784254141030
  • 蛍光X線分析の実際 第2版 13.4章 高空間分解能化のための光学技術
    朝倉書店 2016 ISBN:9784254141030
more...
Lectures and oral presentations  (56):
  • Atomically Controlled Surfacing of Single crystalline SiC and GaN by Catalyst-Referred Etching (CARE)
    (The 6th Quantum Science (QS) symposium -The Main Symposium of ICCMSE 2020 -Computational Chemistry and Computational Physics, ONLINE)
  • Development of Catalyst Referred Etching to Produce Atomically Smooth and Crystallographically Ordered Surfaces
    (The 22nd International Symposium on Advances in Abrasive Technology (ISAAT 2019))
  • Recent Progress in Hard X-ray Reflective Optics for Synchrotron Radiation Sources
    (X RIAO-XIII OPTILAS-MOPM 2019)
  • Fabrication and metrology of precision X-ray optics for new generation synchrotron radiation sources
    (International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2019))
  • Mirror based X-ray optical system for the next generation beamline
    (International Baltic School 2019 "4-th Generation X-ray Sources: coherent optics and techniques")
more...
Work history (5):
  • 2020/04 - 現在 Osaka University Graduate School of Engineering . Division of Precision Engineering and Applied Physics Professor
  • 2003/10/01 - 2020/03/31 Osaka University Graduate School of Engineering Division of Precision Science & Technology and Applied Physics Professor
  • 1998/04/01 - 2003/09/30 Osaka University Graduate School of Engineering Division of Precision Science & Technology and Applied Physics Associate Professor
  • 1992/04 - 2003/09 大阪大学助教授
  • 1984/04 - 1992/03 大阪大学助手
Awards (16):
  • 2023/06 - (公社)発明協会 全国発明表彰 未来創造発明奨励賞 ナノ集光X線ミラー作製のための超精密測定法の発明
  • 2023/04 - 日本国 紫綬褒章 放射光X線の微小ビーム形成技術の開発
  • 2019/07 - (公財)レーザー技術総合研究所 泰山賞(レーザー進歩賞) 超高性能X線集光ミラーの開発
  • 2016/04 - Ministry of Education, Culture, Sports, Science and Technology Commendation for Science and Technology (Research Category) by the Minister of Education, Culture, Sports, Science and Technology
  • 2016/01 - 21st Symposium on Electron Device Interface Technology, The Japan Society of Applied Physics Yasuda Award
Show all
Association Membership(s) (7):
The Optical Society of Japan ,  OSA (The Optical Society of America) ,  EUSPEN (european society for precision engineering and nanotechnology) ,  SPIE (The International Society for Optical Engineering) ,  日本放射光学会 ,  応用物理学会 ,  精密工学会
※ Researcher’s information displayed in J-GLOBAL is based on the information registered in researchmap. For details, see here.

Return to Previous Page