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J-GLOBAL ID:201502207121146448   Reference number:15A1323852

Micro Imprinting for Al Alloy Using Ni-W Electroformed Mold

Ni-W電鋳金型を使用したAl合金のためのマイクロインプリント
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Volume:Issue:Page: 674-677  Publication year: Nov. 05, 2015 
JST Material Number: L0997B  ISSN: 1881-7629  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 
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