Diffraction-Compensating Coded Aperture for Inspection in Manufacturing

SAKUYAMA Tsutomu; FUNATOMI Takuya; IIYAMA Masaaki; MINOH Michihiko

Art

J-GLOBAL ID：201502208372281421 Reference number：15A0784734

Diffraction-Compensating Coded Aperture for Inspection in Manufacturing

製造業での検査のための回折補償符号化開口

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Material：
Volume： 11 Issue： 3 Page： 782-789 Publication year： Jun. 2015
JST Material Number： W1434A ISSN： 1551-3203 CODEN： ITIICH Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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