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J-GLOBAL ID:201502208699946281   Reference number:15A0952662

Nanoscopic mechanism of Cu precipitation at small-angle tilt boundaries in Si

Siにおける小角傾斜境界におけるCu析出のナノスコピック機構
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Volume: 91  Issue: 23  Page: 235315.1-235315.5  Publication year: Jun. 2015 
JST Material Number: D0746A  ISSN: 1098-0121  CODEN: PRBMDO  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Structural hardening phenomena  ,  Lattice defects in semiconductors 
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