Art

J-GLOBAL ID：201502219364456257   Reference number：15A1368169

High current density ion beam obtained by a transition to a highly focused state in extremely low-energy region

極度に低いエネルギー領域において高度に集束した状態への遷移によって得られる高電流密度イオンビーム

Author (5)： HIRANO Y. (Innovative Plasma Processing Group, National Inst. of Advanced Industrial Sci. and Technol. (AIST), Tsukuba, Ibaraki ...) ,  KIYAMA S. (Innovative Plasma Processing Group, National Inst. of Advanced Industrial Sci. and Technol. (AIST), Tsukuba, Ibaraki ...) ,  FUJIWARA Y. (Innovative Plasma Processing Group, National Inst. of Advanced Industrial Sci. and Technol. (AIST), Tsukuba, Ibaraki ...) ,  KOGUCHI H. (Innovative Plasma Processing Group, National Inst. of Advanced Industrial Sci. and Technol. (AIST), Tsukuba, Ibaraki ...) ,  SAKAKITA H. (Innovative Plasma Processing Group, National Inst. of Advanced Industrial Sci. and Technol. (AIST), Tsukuba, Ibaraki ...)
Material： Review of Scientific Instruments  (Rev Sci Instrum)
Volume： 86  Issue： 11  Page： 113303-113303-9  Publication year： Nov. 2015 
JST Material Number： D0517A  ISSN： 0034-6748  CODEN： RSINAK  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *ion beam ,  Hydrogen ,  current density ,  *low energy region ,  beam focusing ,  focal length ,  threshold ,  Faraday cup ,  secondary electron emission ,  collisional ionization

JST classification (1)： Electron and ion beams  (BD02030F)

Terms in the title (5)： エネルギー領域 ,  集束 ,  遷移 ,  高電流密度 ,  イオンビーム