Art

J-GLOBAL ID：201502219556177947   Reference number：15A0880187

Development of magnetically driven micro valve using SU-8/Fe composite

SU-8/Feコンポジットを用いた磁気駆動型マイクロバルブの開発

Author (6)： SUZUKI JUN'YA (香川大) ,  TERAO KYOHEI (香川大) ,  TAKAO HIDEKUNI (香川大) ,  SHIMOKAWA FUSAO (香川大) ,  OHIRA FUMIKAZU (香川大) ,  SUZUKI TAKAAKI (群馬大)
Material： 日本AEM学会誌  (Journal of the Japan Society of Applied Electromagnetics and Mechanics)
Volume： 23  Issue： 2  Page： 407-413  Publication year： Jun. 10, 2015 
JST Material Number： L2703A  ISSN： 0919-4452  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： *photoresist ,  iron ,  *composite material ,  electromagnetic drive ,  *valve ,  MEMS ,  micromachining
Semi thesaurus term： iron ,  *SU-8 ,  *composite ,  *microvalve ,  magnetic driving

JST classification (2)： Manufacturing technology of solid-state devices  (NC03030V) ,  Electromagnetic equipment  (NB10030C)

Reference (11)：

• [1] J. M. Ruano-L'opez et al., “A new SU-8 process to integrate buried waveguide and sealed microchannels for a lab-on-a-Chip”, Sensor and Actuators B: Chemical, Vol. 114, pp. 542-551 (2006).
• [2] F. J. Blanco et al., “3-D Polymeric Microfluidic devices for BioMEMS applications”, Proceeding of SPIE, Vol. 5839, pp. 127-137 (2005).
• [3] B. Cortese et al., “Characterisation of an irreversible bonding process for COC-COC and COC-PDMS-COC sandwich structures and application to microvalves”, Sensor and Actuators B: Chemical, Vol. 160, pp. 1473-1480 (2011).
• [4] D. Kim, et al., “A bi-polymer micro one way valve”, Sensor and Actuators A: Physical, Vol. 136, pp. 426-433 (2007).
• [5] H. C. Chiamori et al., “Suspension of nanoparticles in SU-8: Processing and characterization of nanocomposite polymers”, Microelectronics journal, Vol. 39, pp. 228-236 (2011).

Terms in the title (6)： SU-8 ,  Fe ,  コンポジット ,  磁気駆動 ,  マイクロバルブ ,  開発