Art
J-GLOBAL ID:201502224912749830   Reference number:15A0744558

Development of Porous Epoxy Resin Polishing Pads of Remarkably Improved Retention Properties of Abrasives

砥粒の保持特性を大幅に向上させた多孔質エポキシ樹脂研磨パッドの開発
Author (5):
Material:
Volume: 81  Issue:Page: 108-112 (J-STAGE)  Publication year: 2015 
JST Material Number: U0462A  ISSN: 1882-675X  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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All keywords is available on JDreamIII(charged).
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JST classification (2):
JST classification
Category name(code) classified by JST.
Grinding  ,  Machining and finishing in general 
Reference (4):
  • 1) 村田順二,谷泰弘,広川良一,野村信幸,張宇:ガラス研磨用エポキシ樹脂研磨パッドの開発,日本機械学会論文集 (C編),77,777 (2011) 2153.
  • 2) 野村信幸,広川良一,谷泰弘,村田順二,張宇:エポキシ樹脂研磨パッドによる研磨特性の加工条件依存性,2011年度精密工学会春季大会学術講演会講演論文集,pp. 281-282.
  • 3) 野村信幸,広川良一,谷泰弘,村田順二,張宇:エポキシウレタンパッドによる温度特性改善の効果,2012年度精密工学会秋季大会学術講演会講演論文集,pp. 51-52.
  • 4) 中川貴裕,張宇,谷泰弘,野村信幸:アミド系硬化剤を用いたエポキシ樹脂研磨パッドの開発,2014年度精密工学会秋季大会学術講演会講演論文集,pp. 617-618.

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