Art

J-GLOBAL ID：201502271048712870   Reference number：15A0305526

On-Demand Deposition of Functional Oxide Microdots by Double-Pulse Laser-Induced Dot Transfer

二重パルスレーザ誘起ドット転写による機能性酸化物マイクロドットのオンデマンド堆積

Author (5)： NARAZAKI Aiko (National Inst. of Advanced Indus-trial Sci. and Technol. (AIST), Ibaraki, JPN) ,  KUROSAKI Ryozo (National Inst. of Advanced Indus-trial Sci. and Technol. (AIST), Ibaraki, JPN) ,  SATO Tadatake (National Inst. of Advanced Indus-trial Sci. and Technol. (AIST), Ibaraki, JPN) ,  KAWAGUCHI Yoshizo (National Inst. of Advanced Indus-trial Sci. and Technol. (AIST), Ibaraki, JPN) ,  NIINO Hiroyuki (National Inst. of Advanced Indus-trial Sci. and Technol. (AIST), Ibaraki, JPN)
Material： Journal of Laser Micro/Nanoengineering (Web)  (J Laser Micro Nanoeng (Web))
Volume： 9  Issue： 1  Page： 10-14 (WEB ONLY)  Publication year： Mar. 2014 
JST Material Number： U0377A  ISSN： 1880-0688  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *patterning(transcription) ,  *pulsed laser irradiation ,  pulsed laser ,  *oxide ,  functional material ,  micromachining ,  nanostructure ,  indium tin oxide ,  pattern formation ,  fine patterning ,  silica glass ,  method ,  ink jet printing ,  substrate(plate) ,  electric apparatus and parts ,  temperature distribution ,  finite element method ,  vacancy ,  room temperature ,  focal point
Semi thesaurus term： glass substrate ,  drop-on-demand ,  nanodot ,  micro-patterning

JST classification (2)： Laser irradiation effects and damages  (BK16040S) ,  Manufacturing technology of solid-state devices  (NC03030V)

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Terms in the title (8)： パルス ,  レーザ誘起 ,  ドット ,  転写 ,  機能性 ,  酸化物 ,  オンデマンド ,  堆積