Art
J-GLOBAL ID:201602008050669562   Reference number:73A0033819

White-light interferometric thickness gauge.

白色光干渉計による膜厚測定
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Volume: 11  Issue:Page: 1907-1915  Publication year: 1972 
JST Material Number: B0026B  ISSN: 0003-6935  CODEN: APOPAI  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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