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Art
J-GLOBAL ID:201602011177089795   Reference number:71A0043757

Автозпитаксиальные слои кремния. полученные сублимацией в вакууме из высоколегированных бором источников.

ほう素を強くドープした源からの真空蒸着によって得られるシリコンの自己エピタクシー層
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Material:
Volume: 15  Issue:Page: 1261-1262  Publication year: 1970
JST Material Number: R0058A  ISSN: 0023-4761  CODEN: KRISA   Document type: Article
Article type: 短報  Country of issue: USSR (SUN)  Language: RUSSIAN (RU)
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